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LUXET InGaAs 100 是一款微光顯微成像系統(tǒng)。配備了全自動運(yùn)動系統(tǒng)、深度制冷型InGaAs相機(jī)、不同倍率的顯微鏡頭以及鎖相測量模式,可以適用于半導(dǎo)體器件的失效點(diǎn)定位。
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